Chemical sensor for detecting binding reactions
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United States of America Patent
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Dec 26, 1995
Issued Date -
N/A
app pub date -
Feb 8, 1995
filing date -
Jul 24, 1990
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A chemical sensor includes a piezoelectric support (1) capable of supporting a shear horizontal wave provided on its surface with an electrode (2,3). The sensor is characterized in that the surface of the piezoelectric support (1) including the region bearing the electrode (2,3) is covered by a layer of dielectric material (9) of thickness 0.5 to 20 microns. The piezoelectric support (1) is preferably a single crystal. The dielectric layer (1) may be of, for example, silicon dioxide or a suitable polymer, and preferably has a thickness of between 0.5 and 5 .mu.m.
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