Apparatus for monitoring moisture in a gas stream

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United States of America Patent

PATENT NO 5477716
SERIAL NO

08281286

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A device is provided comprising a piezoelectric material and at least one non-crystalline non-crystalline metal oxide, crystalline-non-zeolite metal oxide and mixtures thereof coating chemically reactive with trace quantities of water in chemically reactive and inert gases. The piezoelectric material is bonded to a conductor for delivering an alternating electric current and to a conductor for transmitting resonant vibration frequency of the crystal. The reactive metal oxide coating has an effective thickness which provides a serviceable life for the coating while not being so thick as to prevent vibration of the piezoelectric material.

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Patent Owner(s)

Patent OwnerAddress
MYKROLIS CORPORATION129 CONCORD ROAD BILLERICA MA 01821-4600

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Snow, James T Nashua, NH 8 112

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