Unitary micro-flexure structure and method of making same
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United States of America Patent
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Dec 19, 1995
Issued Date -
N/A
app pub date -
Dec 10, 1992
filing date -
Nov 27, 1989
priority date (Note) -
Expired
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Abstract
A unitary micro-flexure structure and a method of making the same, wherein the structure takes the form of an elongate dielectric flexure body having a mounting end and a free end, and which is adapted for cantilevered disposition, wherein the body takes a form which is constructed entirely from thin-film deposition and patterning processes involving the deposition of a metal oxide, and further wherein the body has a topography which is at least partially determined by etch-removable surface-boundary-defining structure.
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