Non-stagnant piping system
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United States of America Patent
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Dec 19, 1995
Issued Date -
N/A
app pub date -
Jul 18, 1994
filing date -
Feb 22, 1991
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The present invention relates to a non-stagnant piping system and it is an object of this invention to provide a piping system such that the fluid inside the upstream side piping of a valve portion and inside the valve will not become stagnant in a super pure water line and chemical solution, etc., regardless of whether the valve is in a closed or opened state. A diaphragm valve 3 having a by-pass means 3b installed on the upstream side of the valve portion 3a is mounted in the sub-line 2 branched from the main line 1 in the piping system, and a pressure reducing unit 4 having a pressure reducing portion by a throttling portion 4a, and a by-pass 4b communicating with the throttling portion 4a is installed on the downstream side of the branch point with the sub-line 2 in the main line 1, and moreover, both by-pass means 3b and 4b communicate with each other.
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