Method and apparatus for controlling the reciprocating translation of an interferometer reflector or other body

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United States of America Patent

PATENT NO 5473429
SERIAL NO

08201691

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Abstract

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The method and apparatus effect reversal of a body moving at constant velocity, such as an interferometer reflector, by applying a retrograde electromagnetic force that varies in direct proportion to the distance the body has travelled past the point at which turn around is commenced. Circuitry employed is switched between proportional and integral control configurations, the latter permitting sine-wave oscillation to occur in a servo control loop during reversal.

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Patent Owner(s)

Patent OwnerAddress
MKS INSTRUMENTS INC2 TECH DRIVE SUITE 201 ANDOVER MA 01810

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Carangelo, Robert M Glastonbury, CT 23 278
Jette, Paul C Bethel, CT 4 4

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