Solid state plasma chamber tuner
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United States of America Patent
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-
Dec 5, 1995
Issued Date -
N/A
app pub date -
Apr 27, 1995
filing date -
Nov 16, 1994
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A solid state automatic tuner is used in a plasma processing system for measuring and adjusting a voltage standing wave ratio of the system. The tuner has a switched variable inductor circuit controlled by an automatic control system coupled to an impedance matching circuit. The impedance matching circuit provides an intermediate impedance and matches an output impedance of an RF generator to the varying impedance of a plasma chamber. A variable inductor of the switched variable inductor is constructed as a transformer and allows different values of inductance to be switched in and out of a secondary winding of the transformer. FET switches control pin diodes permitting the different values of inductance to be switched in and out in steps. A VSWR comparator of the control system continuously compares a desired VSWR set point for the system to the current VSWR of the system. A sequence scanner controls the FET switches.
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