Impurity scavenging system
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United States of America Patent
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Oct 24, 1995
Grant Date -
N/A
app pub date -
Nov 30, 1993
filing date -
Dec 1, 1992
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An impurity scavenging system which scavenges impurities of off-gases discharged from a clean room of a production line for semiconductors. The impurity scavenging system has a gas introduction line through which gas to be processed (hereinafter referred as GSP) is discharged, a scavenging unit which stores scavenging liquid, a condenser for condensing vaporized liquid from the scavenging unit, a first pump which pumps the GSP of a discharging line connected with the downstream side of the condenser, a liquid source, a cleaning liquid line which connects the discharging line to a drain and a first valve having ports, including a first port connected with the condenser, a second port connected with the first pump, and a third port connected with one end of the cleaning line another end of which is connected to the drain, thereby selectively enabling a connection from the condenser to the first pump and a connection from the condenser to the cleaning line.
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