Deformable grating apparatus for modulating a light beam and including means for obviating stiction between grating elements and underlying substrate

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United States of America Patent

PATENT NO 5459610
SERIAL NO

08062688

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Abstract

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A modulator for modulating incident rays of light, the modulator comprising a plurality of equally spaced apart beam elements, each of which includes a light reflective planar surface. The elements are arranged parallel to each other with their light reflective surfaces parallel to each other. The modulator includes means for supporting the beam elements in relation to one another and means for moving the beam elements relative to one another so that the beams move between a first configuration wherein the modulator acts to reflect the incident rays of light as a plane mirror, and a second configuration wherein the modulator diffracts the incident rays of light as they are reflected therefrom. At least one of the facing surfaces of the beam elements and underlying substrate is configured to reduce any tendency to stick as they are pulled together. In operation, the light reflective surfaces of the beam elements remain parallel to each other in both the first and the second configurations and the perpendicular spacing between the reflective surfaces of adjacent beam elements is equal to m/4 times the wavelength of the incident rays of light, wherein m=an even whole number or zero when the beam elements are in the first configuration and m=an odd number when the beam elements are in the second configuration.

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Patent Owner(s)

Patent OwnerAddress
BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY THE1705 EL CAMINO REAL PALO ALTO CA 94306-1106

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Apte, Raj B Palo Alto, CA 85 2678
Bloom, David M Portolla Valley, CA 80 4619
Sandejas, Francisco S A Menlo Park, CA 4 1451
Solgaard, Olav Palo Alto, CA 94 2978

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