Charged-particle analyser
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United States of America Patent
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-
Sep 19, 1995
Grant Date -
N/A
app pub date -
Mar 25, 1994
filing date -
Mar 26, 1993
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A charged particle analyzer which irradiates a specimen and analyzes charged particles emitted therefrom, for example a photo electron spectrometer, having a flood-source which emits charged particles to neutralize the charge which develops on a specimen. The analyzer is provided with electrostatic and magnetic lenses which may be used separately or in combination. The flood source is provided within the lens column of the analyzer and is arranged such that when the electrostatic lens is in use, the charged particles emitted by the flood source pass around the outside of the objective electrostatic lens element, whereas when the magnetic lens is in use, or when both lenses are in use, they pass through that element.
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