Microstructure for vibratory gyroscope
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Sep 19, 1995
Grant Date -
N/A
app pub date -
May 4, 1993
filing date -
May 4, 1993
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A microstructure for a vibratory gyroscope has a ring portion supported in such a fashion to allow substantially undamped, high-Q radial vibration. The ring portion is electrically conductive and comprises a charge plate for a plurality of radially disposed charge conductive sites around its perimeter for sensing radial displacements thereof. The ring, its support and charge conductive sites are formed within sacrificial molds on one surface of a conventional silicon substrate which may comprise a monolithic integrated circuit.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully