Method for removing metal impurities from resist components
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Aug 29, 1995
Issued Date -
N/A
app pub date -
Sep 3, 1991
filing date -
Apr 1, 1991
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A method of removing metal impurities from a resist component, comprising the steps of: (a) dissolving said resist component in a solvent; (b) washing a cation exchange resin with a solution of a quaternary ammonium compound; (c) contacting the prewashed cation exchange resin with the solution of resist component to remove metal impurities from said solution of resist component; and (d) separating said cation exchange resin bearing said metal impurities from said resist component solution.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully