Method for removing metal impurities from resist components
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United States of America Patent
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Aug 29, 1995
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N/A
app pub date -
Sep 3, 1991
filing date -
Apr 1, 1991
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Abstract
A method of removing metal impurities from a resist component, comprising the steps of: (a) dissolving said resist component in a solvent; (b) contacting said resist component solution with a cation exchange resin and a chelate resin for a sufficient amount of time to absorb at least a portion of said metal impurities onto said cation exchange and chelate resins; and (c) separating said cation exchange and chelate resins bearing said metal impurities from said resist component solution.
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