Piezoresistive cantilever with integral tip for scanning probe microscope
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United States of America Patent
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Aug 22, 1995
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N/A
app pub date -
Jun 3, 1993
filing date -
Jun 3, 1993
priority date (Note) -
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Abstract
A cantilever for a scanning probe microscope is disclosed. The cantilever includes a piezoresistor for detecting the deflection of the cantilever, and a tip which is formed integrally with the cantilever. A process of fabricating such a cantilever is also disclosed, the process yielding a tip which has a high aspect ratio and a small radius of curvature at its apex. A combined atomic force/lateral force microscope including two or more piezoresistors responsive to both the bending and torsion of the cantilever is also disclosed.
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