Temperature-compensated vibrating beam microsensor
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United States of America Patent
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Aug 22, 1995
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N/A
app pub date -
Feb 22, 1994
filing date -
Aug 23, 1991
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Abstract
A microsensor for application in measurements of pressure including a temperature compensated vibratory bar comprises means for measuring the resonance frequency of the vibratory bar, means for measuring the temperature by interferometric determination of the optical thickness of the bar and means for determining a physical quantity to be measured based on resonance frequency and temperature.
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