Thermal sensing scanning probe microscope and method for measurement of thermal parameters of a specimen
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United States of America Patent
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Aug 15, 1995
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N/A
app pub date -
Sep 27, 1993
filing date -
Sep 27, 1993
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Abstract
The scanning thermal probe microscope measures a thermal parameter such as thermal conductivity or temperature of surface contours of a specimen with a thermal sensor maintained in thermal communication with the surface of the specimen and maintained at a temperature different than that of the specimen. The thermal sensor is disposed on the free end of a cantilever arm in thermal communication with the probe. A thermal feedback bridge circuit can maintain the thermal sensor at a constant temperature by heating or cooling the sensor, and provides a signal for determining the heat transfer between the probe and the specimen. The cantilever arm includes first and second legs of electrically conductive material, and the thermal sensor comprises a narrowed portion of the conducting material having a relatively high temperature coefficient of resistance.
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