Importance

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Abstract

An acceleration sensor for measuring accelerations in at least one direction, the sensor including: a plate-like seismic mass which responds to accelerations, is disposed within a fixed frame and is movably fastened to the frame by at least one web extending between the mass and the frame. A first light waveguide for receiving a light beam from a light source, is disposed on a surface of the seismic mass so that a light beam passing therethrough is deflected as a function of movement of the seismic mass, and a second light waveguide is disposed on a surface of the fixed frame opposite an end of the first light waveguide for coupling the light beam to a detector for detecting deflections of the light beam as a measure of detected acceleration by the sensor. Preferably, the first and second light waveguides comprise planar light conductor paths or strips and the mass, webs and frame are all formed of silicon. The mass may be fastened to the frame by webs along only one edge surface of the mass in the form of a cantilever, or by two webs at opposite edge surfaces of the mass. According to a further and slightly different embodiment, the mass may be fastened to the frame by four webs to provide movement in two different directions.

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First Claim