Charged particle beam exposure apparatus
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United States of America Patent
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Jun 13, 1995
Issued Date -
N/A
app pub date -
Jan 21, 1994
filing date -
Sep 21, 1990
priority date (Note) -
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Abstract
A charged particle beam exposure apparatus includes an irradiator for irradiating a sample with a charged particle beam, an analog controller for analog controlling the charged particle beam, a digital controller for digital controlling the analog controller, and a digital transmission path connecting the analog controller to the digital controller. The analog controller is disposed inside a room, and the digital controller is disposed outside the room.
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