Target cooling system with trough
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United States of America Patent
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Jun 6, 1995
Grant Date -
N/A
app pub date -
Dec 28, 1993
filing date -
Jan 21, 1993
priority date (Note) -
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status (Latency Note)
Importance
Abstract
Cathode sputtering apparatus includes a target, a cooling channel, and a flexible diaphragm therebetween. The target is fixed to a base independently of the diaphragm, so that the target can be replaced with disturbing the cooling channel. In a preferred embodiment, the diaphragm and the target are fixed by respective sets of cleats retained by screws received from respective opposite directions.
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