Charged particle beam exposure apparatus
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United States of America Patent
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May 30, 1995
Grant Date -
N/A
app pub date -
Mar 18, 1994
filing date -
Jun 24, 1993
priority date (Note) -
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Abstract
A barrier electrode is formed above an article to be exposed so as to be opposite the surface of the article to be exposed. A voltage is applied to the barrier electrode so as to form a barrier electric field surrounding the optical axis of a charged particle beam and surrounding the article to be exposed.
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