Three-axis motion tracking interferometer for measurement and correction of positional errors between an article under test and a measurement probe
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United States of America Patent
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May 30, 1995
Grant Date -
N/A
app pub date -
Jan 12, 1994
filing date -
Jan 12, 1994
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A three-axis motion tracking interferometer for use with an article under test (AUT) is provided for measurement and correction of position errors between the AUT and a near-field probing sensor due to thermal drift. The probing sensor is positioned at a plurality of points relative to the AUT to perform a phase front measurement of the AUT. Periodically, the probing sensor is positioned at a subset of the plurality of points, the subset being sufficient to define a geometric surface, such as a plane, cylinder, or sphere. A distance change measurement is performed between the AUT and the probing sensor at each of the subset of points, and three-axis components of relative motion between the AUT and the probing sensor are calculated based upon the distance change measurement. The phase front measurement of the AUT can then be corrected based upon the three-axis components.
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Patent Citation Ranking
- 10 Citation Count
- G01B Class
- 3.36 % this patent is cited more than
- 30 Age