Vacuum treatment apparatus
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United States of America Patent
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-
May 16, 1995
Grant Date -
N/A
app pub date -
Feb 9, 1993
filing date -
Feb 12, 1992
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A vacuum treatment apparatus which is used for the surface treatment of substrates or workpieces in a chamber, includes at least one pneumatically or hydraulically operated seal. The seal can be activated to close against a member for sealing off the chamber, particularly, after a substrate or workpiece has been transported into or removed from the chamber.
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