Vacuum coating apparatus with rotary-driven substrate carrier
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United States of America Patent
Stats
-
May 16, 1995
Grant Date -
N/A
app pub date -
May 5, 1993
filing date -
May 8, 1992
priority date (Note) -
Expired
status (Latency Note)
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Abstract
In a vacuum coating apparatus with a rotary-driven substrate carrier, the bearing of the substrate carrier is implemented as a quasi-hydrostatic rotary transmission feedthrough. For receiving the parts to be coated, a mounting is provided which is operationally connected to a drive shaft. The drive shaft has a bearing disk. In operation this bearing disk is hydrostatically supported wherein the bearing can take place on both sides of the bearing disk via at least one annular channel for each side. The drive shaft is carried radially in the wall of the apparatus and the annular channels are disposed in a spring-supported housing. The bearing disk, in turn, is provided with radial channels which are operationally connected with axial channels of the shaft portion of the drive shaft. In this way the bearing of rotary-driven substrate carriers in the vacuum coating apparatus is solved.
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