Acceleration sensor
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United States of America Patent
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May 9, 1995
Grant Date -
N/A
app pub date -
Sep 1, 1993
filing date -
Sep 4, 1992
priority date (Note) -
Expired
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Abstract
An acceleration sensor includes a silicon substrate with a micromechanical bender bar constituting a testing mass having one end mounted the silicon substrate and a free end opposite the one end. A ferromagnetic core is mounted on the free end of the micromechanical bender bar. An excitation coil is supported on the ferromagnetic core for furnishing an inhomogeneous magnetic field when supplied with an alternating current. A cooled superconducting quantum interference detector (SQUID) arrangement is mounted adjacent the ferromagnetic core for detecting changes in the inhomogeneous magnetic field produced by the excitation coil and produces a useful signal in dependence of changes in the inhomogeneous magnetic field.
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