Optimum conversion chamber
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United States of America Patent
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-
May 2, 1995
Grant Date -
N/A
app pub date -
Dec 15, 1993
filing date -
Dec 15, 1993
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An electrochemical processor having a first frustoconical chamber for receiving a workpiece to be processed. A plurality of sources of process fluids are connected to the frustoconical chamber for sequentially cleaning, providing an electrolyte and sealing the surface of the workpiece. A first valve arrangement connected to the chamber and responsive to a signal from a central processing unit allows the selected fluid to recirculate to provide agitation and at the same time if need to either chill or heat the selected fluid to aid in the desired function of the selected fluid. A second valve arrangement responsive to a signal from the central processing unit allows the selected fluid to drain from the chamber for return to the original supply source or a second frustoconical chamber for processing workpieces in parallel with the first frustoconical chamber.
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