Optical layer for excimer laser
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United States of America Patent
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-
Apr 18, 1995
Grant Date -
N/A
app pub date -
Mar 19, 1993
filing date -
Mar 19, 1993
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An optical layer and arrangements with such a layer are proposed which is predominantly of Ta.sub.2 O.sub.5 and having an absorption constant for ultra-violet light less than 0.0075 for light of 308 nm. Such a layer is produced by ion-beam sputtering of a target which target is predominantly made of Ta.sub.2 O.sub.5.
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