Flow sensor
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United States of America Patent
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Apr 18, 1995
Grant Date -
N/A
app pub date -
Mar 17, 1993
filing date -
Mar 17, 1992
priority date (Note) -
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status (Latency Note)
Importance
Abstract
A flow sensor is disclosed, which has a thin film heater which is formed atop a cavity formed in the substrate, and the thin film heater is formed on its upstream and downstream sides with slits for separating it and temperature sensors from the substrate. The slits have such a small width that a laminar flow of gas can be maintained. In the case where the film heater has a positive resistance temperature coefficient, the thin film heater is disposed such that current flows in a direction of the gas stream, in case when the film heater has a negative temperature coefficient, the thin film heater is disposed such that current flows in a direction perpendicular to the gas stream.
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