Inlet valve for a high-vacuum analyzer with bypass evacuation
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United States of America Patent
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Apr 11, 1995
Grant Date -
N/A
app pub date -
Jan 27, 1993
filing date -
Jan 27, 1992
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An ultra-high vacuum valve for the admission of substance mixtures into an analytical measuring instrument limits the flow path of the substances to as small a flow chamber as possible with controllable chamber wall adsorption properties. The elastic wall sections necessary for movement of the valve piston are located in a mechanical chamber separated from the flow chamber by a wall. The mechanical chamber is evacuated by means of a separate vacuum duct and a seal is used to seal the valve piston where it passes through the wall.
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