Module in an integrated delivery system for chemical vapors from liquid sources
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United States of America Patent
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Mar 21, 1995
Grant Date -
N/A
app pub date -
Mar 10, 1994
filing date -
Mar 10, 1994
priority date (Note) -
Expired
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Abstract
An integrated module with a heated reservoir to vaporize liquid for semiconductor processes with liquid sources is presented. Shut-off valves and a proportioning pressure valve for controlling the flow of the vapor from the reservoir are mounted on the module for simple conduction heating of the valves. A capacitance manometer also mounted to the module also has its own heating elements. Condensation of the vapor is avoided and consistence performance and reliability is obtained.
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