Flow sensor
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United States of America Patent
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Feb 28, 1995
Grant Date -
N/A
app pub date -
Jun 7, 1993
filing date -
Jun 7, 1993
priority date (Note) -
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Abstract
A flow sensor for sensing heat transfer with a high-speed response, which is manufactured by applying IC micro-machining technology, and which attains an improved heat transfer efficiency by controlling the flow's direction between a heating portion and a sensing portion or by utilizing the intrinsic characteristics of the gas flow. The flow sensor has a substrate whereon a heating portion and a sensing portion are formed each in the form of a bridge supported at both ends or at one end in the direction of the flowing gas to be measured, and which is placed, its surface with the elements down, at the upper inside wall of a pipe for gas to be measured. Its output signal is taken out through lead wires.
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