Inclination angle metering apparatus

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United States of America Patent

PATENT NO 5392112
SERIAL NO

08237916

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An inclination angle metering apparatus is arranged such that a beam from a light source is split into two beams by a half-mirror provided in a light path between the light source and the surface of a liquid. One beam is reflected by the liquid surface falls on a line sensor, and the other beam falls on the line sensor without reflected by the liquid surface. When a housing and the liquid are relatively inclined, an incident position of one beam changes on the line sensor, whereas an incident position of the other beam does not change. An inclination angle to the liquid surface is determined based on the incident position of one beam with respect to the incident position of the other beam.

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Patent Owner(s)

Patent OwnerAddress
NIKON CORPORATION1-5-20 NISHIOI SHINAGAWA-KU TOKYO 140-8601

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Nakamura, Masahiro Yokohama, JP 238 2644

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