Plasma pressure control assembly
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United States of America Patent
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Feb 21, 1995
Issued Date -
N/A
app pub date -
Jun 2, 1994
filing date -
Dec 8, 1992
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A plasma assembly including an RF head extending into a vacuum chamber and an associated electrode for generating a confined plasma. The assembly includes a sidewall within the chamber forming a plenum about the RF head. The plenum defines a volume substantially smaller than the volume of the chamber and hence, the gas pressure within the plenum is more easily monitored and controlled by the provision of make-up gas.
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