Atmosphere sensor and method for manufacturing the sensor
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United States of America Patent
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Feb 14, 1995
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N/A
app pub date -
Jun 24, 1993
filing date -
Jun 24, 1993
priority date (Note) -
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Abstract
A sensor or detector for fluid parameters is in the form of a substrate having at least two cavities and at least two sensing or detecting portions bridging respective cavities. The sensing portions include a first sensing unit which is exposed to the ambient and a second sensing unit which serves a compensating function and is in an air-tight enclosure formed by joining a cover plate with the substrate by a solid adhesive layer formed around the boundary of the second sensing unit. An adhesive tape can be attached to the cover plate to facilitate dicing and separating sensors or detectors that are initially formed on the same substrate.
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