Pumping state turbomolecular pumps
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Feb 7, 1995
Issued Date -
N/A
app pub date -
Oct 21, 1993
filing date -
Jul 10, 1991
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
The present invention refers to a pumping stage for turbomolecular pumps comprising a rotor disk (3), integral with a rotating shaft (4) operated by a motor, and a stator disk (1) said stator disk (1), integral with the pump body (2), where the stator disk (1) is a disk whose surface is substantially smooth that can assume, during the evacuation cycle, a bladed configuration, by raising radial sections (5) of the disk surface itself. Raising of radial sections (5) is performed by at least one actuator device (11) controlled, through an electronic control device (12), by a pressure sensor (13) sampling the pressure inside the pump body (2).
First Claim
Other Claims data not available