X-ray optical element and method for its manufacture
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United States of America Patent
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Jan 24, 1995
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N/A
app pub date -
Jul 12, 1993
filing date -
Jul 12, 1993
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Expired
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Abstract
X-ray dispersive elements comprise a stacked array of layer pairs of boron nitride and either nickel, tungsten, chromium, vanadium, iron, manganese, cobalt and combinations thereof. The boron nitride is preferably deposited through a planar magnetron sputtering process.
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