Partial coherence varier for microlithographic system
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jan 17, 1995
Grant Date -
N/A
app pub date -
Nov 24, 1992
filing date -
Nov 24, 1992
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A microlithographic projection imaging system has an illuminator optical system and an objective imaging system, and an adjustable profiler or energy distributor in the illuminator optical system varies the numerical aperture of the illuminator, for varying the partial coherence of the projection imager. The adjustable profiler can be a diffuser, a binary optic, a hologram, or a fly's eye lens that is axially movable in a non-collimated region of the illumination path for imposing a predetermined angular profile on each of a multitude of fragments of the illumination. This changes the distribution of the illumination energy at the pupil of the illuminator and thus varies the numerical aperture and the angular energy profile of the illumination arriving at the objective imaging system, which is also preferably made uniform in spatial intensity by a uniformizer in the illuminator upstream of the pupil.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully