Precision cleaning system
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United States of America Patent
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-
Jan 3, 1995
Grant Date -
N/A
app pub date -
Sep 16, 1993
filing date -
Sep 16, 1993
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An improved precision cleaning method includes introducing a solvent to a cleaning vessel, placing a workpiece in the cleaning vessel and contacting the workpiece with the solvent during a residence period. The cleaning vessel is then pressurized to a target pressure by adding carbon dioxide to the vessel, and additional carbon dioxide is pumped into the vessel while maintaining the target pressure to flush contents of the vessel. Cleaning may be enhanced by pressurizing to above the supercritical point of the carbon dioxide, and cleaning is further enhanced by application of sonic energy or mechanical agitation.
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