Piezoelectric sensor
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United States of America Patent
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Dec 27, 1994
Grant Date -
N/A
app pub date -
Oct 12, 1993
filing date -
Oct 19, 1992
priority date (Note) -
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Abstract
A piezoelectric sensor for detecting vibrations is disclosed, the sensitivity of which is less temperature dependent than that in the prior art even when it is used in a broad temperature range. A lower member made of alumina is secured by an epoxy type adhesive to the inner bottom surface of a vessel made of an iron-nickel alloy containing 42% by weight of nickel. A piezoelectric element using a PZT piezoelectric body is secured by an adhesive to the lower member 33. An upper member made of alumina having electrodes is secured to the piezoelectric element with the electrodes of the upper member and those of the piezoelectric element soldered to one another. The plan dimensions of the upper and lower members are slightly greater than those of the piezoelectric element. On the lamination including the piezoelectric element and lower and upper members, a thermally shrinkable tube is fitted, thus forming spaces adjacent the top surface and periphery of the piezoelectric element. In this state, the piezoelectric element and so forth are sealed with a resin.
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