Turbo-pumped scanning electron microscope
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United States of America Patent
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Dec 27, 1994
Grant Date -
N/A
app pub date -
Apr 26, 1993
filing date -
Apr 26, 1993
priority date (Note) -
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Abstract
A scanning electron microscope with an effective vacuum evacuation system and vacuum pump mounting system is disclosed. A manifold having a sufficiently large gas conductance is connected to a gun assembly and to a specimen chamber. A vacuum pump is connected to the manifold for evacuating the gun assembly, specimen chamber and a beam tube. The vacuum pump mounting includes a cylindrical sleeve extending between the vacuum pump and the scanning electron microscope housing with a pair of radial O-rings sealing between the cylindrical sleeve, housing and vacuum pump.
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