Method and apparatus for moving a material removal tool with low tool accelerations
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United States of America Patent
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Dec 20, 1994
Grant Date -
N/A
app pub date -
Dec 2, 1993
filing date -
Dec 2, 1993
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A stage 14 supporting a material removal tool 12 is instructed by a controller 16 through interface 18 to accelerate and decelerate the material removal tool 12 within at least one predetermined spatial interval while satisfying the dwell-time required to remove a predetermined amount of material to achieve a desired thickness of the spatial interval.
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