Vacuum treatment apparatus comprising annular treatment chamber
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United States of America Patent
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-
Dec 6, 1994
Grant Date -
N/A
app pub date -
Dec 28, 1992
filing date -
Dec 27, 1991
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A vacuum treatment apparatus for workpieces includes an annular treatment chamber having inner and outer surrounding walls and top and bottom walls. A carrier for a multitude of workpieces is provided. The carrier is arranged in a carousel-like manner in the annular treatment chamber. A drive mechanism linked to the carrier, drives the carrier. At least one part of at least one of the walls may be opened to open the annular treatment chamber for charging and discharging. The at least one part is of such an extent so as to allow charging and discharging with a plurality of the multitude of workpieces simultaneously.
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