Monolithic microwave power sensor

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United States of America Patent

PATENT NO 5370458
SERIAL NO

07595067

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Abstract

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A monolithic integrated circuit power sensor provides a monolithic integrated circuit substrate a conversion element formed either on or in the substrate for converting microwave energy into heat, an electrically insulating dielectric layer affixed to the conversion element, and an integrated circuit, heat sensitive element formed in sufficiently close proximity to the conversion element to be thermally coupled thereto through the dielectric layer for sensing temperature changes in the conversion element.

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Patent Owner(s)

Patent OwnerAddress
LOCKHEED MARTIN CORPORATION6801 ROCKLEDGE DRIVE BETHSEDA MD 20817

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Goff, Miles E Carlisle, MA 8 218

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  • 16 Citation Count
  • H01L Class
  • 45.48 % this patent is cited more than
  • 31 Age
Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges133842351204041185611901 - 1011 - 2021 - 3031 - 4041 - 5051 - 6061 - 7071 - 8081 - 9091 - 100100 +0255075100125150175200225250275300325350375400425

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