Semiconductor film bolometer thermal infrared detector
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United States of America Patent
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Nov 29, 1994
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N/A
app pub date -
Dec 17, 1992
filing date -
Apr 26, 1990
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Abstract
A thermal infrared detector comprising a dielectric pellicle suspended over a cavity in a substrate, the pellicle supporting a detector element comprising a heat sensitive semiconductor layer between a pair of thin fim metallic contracts, these being deposited on the pellicle, the cavity being formed by etching and removal of the substrate material through holes or slots in the surface of the substrate.
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