Infrared detector devices and their manufacture
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United States of America Patent
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Nov 22, 1994
Grant Date -
N/A
app pub date -
Mar 15, 1993
filing date -
Mar 18, 1992
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
Compact electrical connections (4) are formed on side-walls (1) of an infrared detector element having a step structure (1 to 3) over which a conductive layer (40) is deposited. Using a directional etching treatment, such as ion milling, the conductive layer (40) is removed from at least the bottom (3) of the step structure but is left lining the side-wall (1) as the connection (4). This permits formation of connections (4 and 44) in compact dense arrays, including plural-wavelength arrays in stacked bodies (10 and 20) on a circuit substrate (30).
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