Plasma stabilizing apparatus employing feedback controls
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United States of America Patent
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Nov 15, 1994
Grant Date -
N/A
app pub date -
Jul 27, 1992
filing date -
Nov 28, 1990
priority date (Note) -
Expired
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Abstract
A plasma stabilizing apparatus having circuits for measuring electron temperature and electron density of a plasma using triple probes, a plasma gas pressure control circuit, and a plasma excitation power control circuit, for automatically stabilizing the plasma.
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