Magnetron cathode for a rotating target
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United States of America Patent
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Nov 15, 1994
Issued Date -
N/A
app pub date -
Nov 13, 1992
filing date -
May 28, 1991
priority date (Note) -
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Abstract
Magnets are arranged inside a rotating tubular target to form a racetrack-shaped plasma having two straight stretches parallel to the target axis and two end stretches connecting the straight stretches. In order to achieve uniform target erosion, the magnets are arranged so that the plasma is wider and therefore less intense over the end stretches than it is over the straight stretches.
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