Method for producing single crystal superconducting LnA.sub.2 Cu.sub.3 O.sub.7-x films
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United States of America Patent
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Nov 8, 1994
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N/A
app pub date -
Apr 27, 1993
filing date -
Sep 21, 1987
priority date (Note) -
Expired
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Abstract
A process for forming a single crystal superconducting LnA.sub.2 Cu.sub.3 O.sub.7-x film, wherein Ln is at least one rare earth element and A is at least one alkaline earth element, is disclosed, which comprises simultaneously evaporating Ln, A and Cu in an atomic ratio of about 1:2:3 from discrete evaporation sources of Ln, A and Cu onto a heated substrate in a vacuum vessel while blowing an oxygen gas onto the substrate to form an oxygen-containing atmosphere, thereby forming the single crystal superconducting film on the substrate.
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