Method of controlling moving element of magnetic levitation and transport system
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United States of America Patent
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Oct 25, 1994
Issued Date -
N/A
app pub date -
Oct 22, 1993
filing date -
Aug 24, 1989
priority date (Note) -
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Abstract
A magnetic levitation and transport system has a plate-like moving element (SFT) which is moved by a linear motor disposed in a stator (STT). The moving element is moved vertically by first through fourth electromagnetic devices (MGV.sub.10 -MGV.sub.41), and fifth and sixth electromagnetic devices (MGH.sub.10 -MGH.sub.21) exert forces on the moving element in a horizontal direction perpendicular to the direction in which the moving element is moved. Gaps between the moving element and the electromagnetic devices are detected by gap sensors which produce gap data. In the vertical direction, for example, attractive force commands (f.sub.V1 -f.sub.V2) are produced from the outputs from a circuit for calculating the amount of feedback (10) which is supplied with the gap data (XV.sub.1 -XV.sub.4) and also with the output from a variable gain g.sub.V (l) generator (60) to which the position (l) of the center of gravity of the moving element is supplied. The attractive force commands are then linearized by linearizing circuits (71-74), and linearized outputs are applied to the electromagnetic devices. With this arrangement, the variable gains can be established by an analog circuit, and control gains in the respective control directions can be given independently of each other.
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