Plasma diagnosing apparatus
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United States of America Patent
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Oct 25, 1994
Grant Date -
N/A
app pub date -
Jul 15, 1992
filing date -
Nov 16, 1990
priority date (Note) -
Expired
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Abstract
A plasma diagnosing apparatus for performing plasma diagnosis witch probes having a high degree of cleanliness by removing contamination caused by reactive plasma, etc., while quantitatively detecting a degree of the contamination of the probes. The disclosed apparatus avoids the disadvantages of conventional apparatuses, in which the voltage-current characteristics of the probes are deteriorated by growth of the contaminant film formed on the probes, making it difficult to measure the parameters of the plasma conditions.
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