Capacitive differential pressure sensor and method of measuring differential pressure at an oil or gas well
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United States of America Patent
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Oct 25, 1994
Grant Date -
N/A
app pub date -
May 3, 1993
filing date -
May 3, 1993
priority date (Note) -
Expired
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Abstract
A capacitive differential pressure sensor comprises two end pieces and a central diaphragm all of the same type of electrically non-conductive material, such as quartz. As the central diaphragm moves relative to the end pieces in response to pressures applied through the end pieces, capacitance changes are sensed through one pair of facing electrodes on one end piece and the diaphragm and another pair of facing electrodes on the other end piece and the diaphragm. A method of measuring differential pressures at an oil or gas well with such a sensor is also disclosed.
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