Micromachined microaccelerometer for measuring acceleration along three axes
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United States of America Patent
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Oct 25, 1994
Grant Date -
N/A
app pub date -
Apr 8, 1992
filing date -
Apr 8, 1992
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The present invention relates to a microaccelerometer employing a single free-mass and capable of measuring acceleration along three coordinate axes, and a process for fabricating through micromachining and microelectronic techniques a microaccelerometer employing a free-mass. A microaccelerometer preform is constructed by chemically coating and etching a silicon wafer to form a support member and a free-mass surrounded by the member. The free-mass is movable with respect to, but constrained by the silicon support member. Acceleration measurements are obtained by circuits which sense changes in the position of the free-mass with respect to an equilibrium position, induced by a change in the rate of acceleration of the accelerometer, and the electromagnetic force required to restore the free-mass to its equilibrium position.
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